PDF/月刊誌論文/code:pg_1012_11 マテリアル インテグレーション 2010年12月号
ELECTRONIC CERAMICS 受動電子部品のエンベッディド化技術

フレキシブルエレクトロニクスに向けた受動素子内蔵化技術
■著者
株式会社富士通研究所　環境・エネルギー研究センター 主管研究員 今中 佳彦

■要約
The rapid evolution in electronic equipment has created a demand for advanced devices that are flexible, thin, and light in weight. This demand is driving the development of flexible and stretchable electronic devices as a core technology. To produce wearable computers, we need to fabricate functional membranes that contain passive devices such as capacitors and resistors on resin sheets at low temperatures. These sheets can then serve as mounting boards for various electronic devices. By improving the technique for room-temperature aerosol deposition of a ceramic material, we have established a technology for forming a dielectric inorganic film with an excellent degree of crystallinity and favorable electric properties for use in the production of flexible and stretchable electronic devices on a polyimide sheet. By using this method to form a three-dimensional capillary structure inside a film, we produced a capacitor film with an apparent dielectric constant of 40,000 at room temperature.