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PDF/月刊誌論文/code:pg_0509_05 マテリアル インテグレーション 2005年9月号
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電子出版物(マテリアルインテグレーション論文)
> 2005
PDF/月刊誌論文/code:pg_0509_05 マテリアル インテグレーション 2005年9月号
ELECTRONIC CERAMICS 世界の熱電変換材料(1)
Development of Thermoelectric Micromodules with High-Aspect-Ratio Elements
■著者
Department of Materials Science and Engineering Jing-Feng Li
■要約
We have combined MEMS technology and materials processing into a novel process to manufacture thermoelectric micro-modules with densely aligned fine and high-aspect-ratio p-n elements. Our process consists of the following major steps: (1) micromachining a silicon mold with microhole array in both sides; (2) filling a single mold with p- and n-type thermoelectric materials; (3) connecting p- and n-type elements and assembling the whole module. By using the present process, Bi-Sb-Te system thermoelectric elements of 300 μm height and 40 μm cross-sectional width were fabricated successfully.
