PDF/月刊誌論文/code:pg_1104_29 マテリアル インテグレーション 2011年4月号
MATERIALS INTEGRATION 地域と世界に貢献する東北大学多元物質科学研究所(4,5月合併号)

表面物理計測の進展と機能性薄膜創製への展開
■著者
東北大学多元物質科学研究所 計測研究部門　表面物理プロセス研究分野 高桑 雄二

■要約
In the research section of surface physics and processing (Takakuwa laboratory), we aim to develop various surface analysis methods with electron and photon probes, for example, real-time photoelectron spectroscopy using synchrotron radiation and rare gas resonance lines for monitoring in situ surface chemical compositions and bonding states under a reactive gas atmosphere, and correlated thermal diffuse scattering for determining unambiguously surface structures. Based on the observed chemical and solid phase reaction kinetics at surfaces and interfaces, we have synthesized functional materials such as diamond and multilayer graphene, and developed surface nanoprocesses, for example, a photoemission-assisted plasma-enhanced process for modifying substrate surfaces.